Below you will find pages that utilize the taxonomy term “Fast” Fast response infrared heater bulb On the 300mm line, a 15-second soft bake that drifts by 2°C will show up as a linewidth excursion in the resist. You only get one shot at exposure.... Read more...
Fast response infrared heater bulb On the 300mm line, a 15-second soft bake that drifts by 2°C will show up as a linewidth excursion in the resist. You only get one shot at exposure.... Read more...
