Keeping Things Safe with IR Heating in Chemical Zones When you’re drying wafers in a semiconductor fab, you’re usually playing with some...

Don’t Let a Broken Lamp Kill Your Batch: Keeping MEMS Wafers Clean In a high-volume MEMS setup, one bad break can ruin everything. It happens...

Back on the line, a wet MEMS wafer comes out of cleaning and sits waiting. The next stop—photoresist coat, soft bake, and a clean dry—has zero...